Sensitivity and selectivity enhancement in semiconductor gas sensors

Makoto Egashira; Yasuhiro Shimizu

doi:10.1117/12.47297

1 November 1991 Sensitivity and selectivity enhancement in semiconductor gas sensors

Makoto Egashira, Yasuhiro Shimizu

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47297
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

To date numerous efforts have been made to enhance the sensitivity and selectivity of semiconductor gas sensors to a specific gaseous component. Advantages of these modifications will be discussed in terms of the principle factors in physics and chemistry that are associated with the gas-sensing mechanism of semiconductor gas sensors.

Citation Download Citation

Makoto Egashira and Yasuhiro Shimizu "Sensitivity and selectivity enhancement in semiconductor gas sensors", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47297

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