Calibration of profilometer transmission characteristics with heterodyne interferometry (Proceedings Only)

Pengsheng Li; Hua Li; Zuo Zhang

doi:10.1117/12.135347

1 January 1992 Calibration of profilometer transmission characteristics with heterodyne interferometry (Proceedings Only)

Pengsheng Li, Hua Li, Zuo Zhang

Author Affiliations +

Proceedings Volume 1553, Laser Interferometry IV: Computer-Aided Interferometry; (1992) https://doi.org/10.1117/12.135347
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

A method of calibrating profilometer transmission characteristics with a heterodyne interferometer is described. This method has the advantages of high precision, setting no strict demands on the environment and being efficient. The work range of the calibrating system is from 0.15 micrometers to 40 micrometers for Ra. The uncertainty of the calibrating is +/- 1%, and the frequency is between 1 Hz and 180 Hz.

Citation Download Citation

Pengsheng Li, Hua Li, and Zuo Zhang "Calibration of profilometer transmission characteristics with heterodyne interferometry (Proceedings Only)", Proc. SPIE 1553, Laser Interferometry IV: Computer-Aided Interferometry, (1 January 1992); https://doi.org/10.1117/12.135347

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