Microreflective elements for integrated planar optics interconnects

Yunlong Sheng; Claude A. Delisle; Louis M. Moreau; Li Song; Roger A. Lessard; Henri H. Arsenault

doi:10.1117/12.50672

1 December 1991 Microreflective elements for integrated planar optics interconnects

Yunlong Sheng, Claude A. Delisle, Louis M. Moreau, Li Song, Roger A. Lessard, Henri H. Arsenault

Proceedings Volume 1559, Photopolymer Device Physics, Chemistry, and Applications II; (1991) https://doi.org/10.1117/12.50672
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Binary optics reflective gratings and micro mirrors are studied for integrated planar optical interconnect applications. The staircase profile surface relief gratings have high efficiency at small diffraction angles. The micro mirrors provide larger deflection angles. Fabrication of both elements is discussed and experimented on a photoresist layer.

Citation Download Citation

Yunlong Sheng, Claude A. Delisle, Louis M. Moreau, Li Song, Roger A. Lessard, and Henri H. Arsenault "Microreflective elements for integrated planar optics interconnects", Proc. SPIE 1559, Photopolymer Device Physics, Chemistry, and Applications II, (1 December 1991); https://doi.org/10.1117/12.50672

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