Vibration measurement techniques for advanced test and manufacturing facilities

Randy O. Goucher; Dennis Smith

doi:10.1117/12.56846

1 February 1992 Vibration measurement techniques for advanced test and manufacturing facilities

Randy O. Goucher, Dennis Smith

Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992) https://doi.org/10.1117/12.56846
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States

Abstract

Great strides were made during the 1980s in precision measurement and manufacturing technology. While the facilities that host these advanced processes are often different in design and function, a common concern arises in the operation of both. Excessive facility vibrations can have an adverse effect on both precision manufacturing and precision measurement operations. Frequently, vibration suppression or isolation systems are used to reduce the effects of facility vibrations on precision measurement or manufacturing equipment. The proper application of digital data acquisition and signal processing techniques can provide great insight into the influence of facility vibrations on these, and other precision operations. This paper reviews a set of techniques well suited for the measurement of facility vibrations and evaluating the need for and effectiveness of vibration isolation systems. An example of the application of these techniques to a particular facility is provided to demonstrate their use and show typical results.

Citation Download Citation

Randy O. Goucher and Dennis Smith "Vibration measurement techniques for advanced test and manufacturing facilities", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56846

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