Quality control during excimer laser material processing

Manfred Geiger; Norbert Lutz; Thomas Rebhan; Joachim Hutfless

doi:10.1117/12.144562

4 May 1993 Quality control during excimer laser material processing

Manfred Geiger, Norbert Lutz, Thomas Rebhan, Joachim Hutfless

Proceedings Volume 1810, 9th International Symposium on Gas Flow and Chemical Lasers; (1993) https://doi.org/10.1117/12.144562
Event: Ninth International Symposium on Gas Flow and Chemical Lasers, 1992, Heraklion, Greece

Abstract

Excimer lasers prove to be useful tools for precise structuring and uniform surface modification of thin surface layers of ceramics, glasses, and composites. They provide high energy laser pulses and a uniform intensity distribution. Processing quality is strongly affected by laser and process parameters. It is demonstrated that the integration of diagnostics in an excimer laser processing system results in an optimization of processing quality by appropriate choice of the process parameters.

Citation Download Citation

Manfred Geiger, Norbert Lutz, Thomas Rebhan, and Joachim Hutfless "Quality control during excimer laser material processing", Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); https://doi.org/10.1117/12.144562

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