Aplanatic microlenses and applications in the semiconductor industry

Mark P. Davidson

doi:10.1117/12.149014

4 August 1993 Aplanatic microlenses and applications in the semiconductor industry

Mark P. Davidson

Proceedings Volume 1926, Integrated Circuit Metrology, Inspection, and Process Control VII; (1993) https://doi.org/10.1117/12.149014
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

An aplanatic microlens is a small (typically 10 to 450 microns) diameter lens, which is placed close to the object being viewed and acts as a pre-magnifying lens for a microscope system. The lens is mounted on a stalk for easy positioning with a micromanipulator. All aberrations scale with size, so this small lens shows good chromatic correction. It is broad band even in the deep ultraviolet and even at high numerical aperture. The lens operates as a nearfield immersion lens when its planar surface touches the object being viewed. In this case the numerical aperture can be as large as n, the index of refraction of the material of the lens. For fused silica, a convenient material, this is about 1.46.

Citation Download Citation

Mark P. Davidson "Aplanatic microlenses and applications in the semiconductor industry", Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); https://doi.org/10.1117/12.149014

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