Formation of optical disk direction paths and optical master disks with the help of inorganic resists

Sergey A. Kostyukevych; Peter E. Shepeljavi; Ivan Z. Indutnyi; Alexander V. Stronski; Apollinary I. Stetsun

doi:10.1117/12.163608

9 November 1993 Formation of optical disk direction paths and optical master disks with the help of inorganic resists

Sergey A. Kostyukevych, Peter E. Shepeljavi, Ivan Z. Indutnyi, Alexander V. Stronski, Apollinary I. Stetsun

Proceedings Volume 2026, Photonics for Processors, Neural Networks, and Memories; (1993) https://doi.org/10.1117/12.163608
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

In this work, the results of investigations performed on As40S40Se20 and As40S60 layers are presented, peculiarities of optical disks direction paths and optical master disks formation with the help of laser lithography are described.

Citation Download Citation

Sergey A. Kostyukevych, Peter E. Shepeljavi, Ivan Z. Indutnyi, Alexander V. Stronski, and Apollinary I. Stetsun "Formation of optical disk direction paths and optical master disks with the help of inorganic resists", Proc. SPIE 2026, Photonics for Processors, Neural Networks, and Memories, (9 November 1993); https://doi.org/10.1117/12.163608

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