Porous silicon - a new material studied by IR spectroscopy

Wolfgang Theiss; M. Arntzen; Stefan Facsko; M. Feuerbacher; M. Wernke; Peter Grosse; H. Muender; M. Thoenissen

doi:10.1117/12.166757

31 January 1994 Porous silicon - a new material studied by IR spectroscopy

Wolfgang Theiss, M. Arntzen, Stefan Facsko, M. Feuerbacher, M. Wernke, Peter Grosse, H. Muender, M. Thoenissen

Proceedings Volume 2089, 9th International Conference on Fourier Transform Spectroscopy; (1994) https://doi.org/10.1117/12.166757
Event: Fourier Transform Spectroscopy: Ninth International Conference, 1993, Calgary, Canada

Abstract

We show how IR spectroscopy can be employed successfully in the analysis of porous silicon, e.g., to monitor important parameters as the hydrogen and oxygen concentration or the layer thickness nondestructively.

Citation Download Citation

Wolfgang Theiss, M. Arntzen, Stefan Facsko, M. Feuerbacher, M. Wernke, Peter Grosse, H. Muender, and M. Thoenissen "Porous silicon - a new material studied by IR spectroscopy", Proc. SPIE 2089, 9th International Conference on Fourier Transform Spectroscopy, (31 January 1994); https://doi.org/10.1117/12.166757

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