Practical method of phase-shifting mask fabrication

Morihisa Hoga; Yasuhiro Koizumi; Fumio Mizuno; H. Nakaune

doi:10.1117/12.191927

3 November 1994 Practical method of phase-shifting mask fabrication

Morihisa Hoga, Yasuhiro Koizumi, Fumio Mizuno, H. Nakaune

Proceedings Volume 2254, Photomask and X-Ray Mask Technology; (1994) https://doi.org/10.1117/12.191927
Event: Photomask Japan '94, 1994, Kawasaki City, Kanagawa, Japan

Abstract

Phase-shifting mask (PSM) fabrication techniques have been investigated in order to use PSMs in the manufacturing of 0.3 micrometers memory devices. Comparison of various PSM methods resulted in selection of the SOG (spin on glass)-on-chrome structure. The alternating-type method is used for the wiring layer and the outrigger-type method is used for the hole layer. New techniques are needed for fabricating the PSMs, and the following technologies have been developed or are under development: (1) e-beam writing and process, (2) SOG process, and (3) inspection and repair. Defect free SOG-on-chrome PSMs are available because SOG process is a low defect density process. PSMs and negative i-line resist have been used to experimentally manufacture 0.35 micrometers memory devices, thus demonstrating that SOG-on- chrome PSMs are currently the most practical for memory device manufacturing.

Citation Download Citation

Morihisa Hoga, Yasuhiro Koizumi, Fumio Mizuno, and H. Nakaune "Practical method of phase-shifting mask fabrication", Proc. SPIE 2254, Photomask and X-Ray Mask Technology, (3 November 1994); https://doi.org/10.1117/12.191927

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available