Visible photoluminescent Ge nanocrystals embedded in a-SiNx films

Xuexuan Qu; Xinfan Huang; Kun-Ji Chen; Zhifeng Li; Duan Feng

doi:10.1117/12.190814

26 October 1994 Visible photoluminescent Ge nanocrystals embedded in a-SiN_x films

Xuexuan Qu, Xinfan Huang, Kun-Ji Chen, Zhifeng Li, Duan Feng

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190814
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

Ge nanocrystals embedded in a-SiN_x matrix were prepared by the PECVD method with SiH₄, GeH₄ and NH₃ mixed in H₂ plasma and followed the thermal-annealing treatment, which was based on the preferential chemical bonding formation of Si-N and Ge-Ge. The samples were characterized by infrared absorption, X-ray diffraction, Raman scattering spectra and TEM micrograph. Visible photoluminescence was observed at room temperature with the PL peak at about 560 nm and the linewidth about 0.45 eV. We are temporarily using the quantum confinement model to explain the PL mechanism.

Citation Download Citation

Xuexuan Qu, Xinfan Huang, Kun-Ji Chen, Zhifeng Li, and Duan Feng "Visible photoluminescent Ge nanocrystals embedded in a-SiN_x films", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190814

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available