Paper
22 September 1995 Efficient and stable implementation of rigorous coupled-wave analysis for surface-relief gratings
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Abstract
Computationally efficient and stable implementations of rigorous coupled-wave analysis for 1D and 2D surface-relief gratings are presented. The eigenvalue problem for a 1D grating in a conical mounting is reduced to two eigenvalue problems in the corresponding nonconical mounting. The matrix in the eigenvalue problem of 2D gratings is reduced in size by a factor of two. These simplifications reduce the computation time for the eigenvalue problem by 8 to 32 times compared to the original computation time. The required computer memory is also decreased thus complicated grating diffraction problems can be solved efficiently.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Song Peng and G. Michael Morris "Efficient and stable implementation of rigorous coupled-wave analysis for surface-relief gratings", Proc. SPIE 2532, Application and Theory of Periodic Structures, (22 September 1995); https://doi.org/10.1117/12.221262
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KEYWORDS
Diffraction gratings

Diffraction

Americium

System on a chip

Dielectrics

Differential equations

Dielectric polarization

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