Quality assurance of dielectric masks for laser ablation technology

Doris Pulaski; Rajesh S. Patel; James L. Speidell

doi:10.1117/12.228191

8 December 1995 Quality assurance of dielectric masks for laser ablation technology

Doris Pulaski, Rajesh S. Patel, James L. Speidell

Proceedings Volume 2621, 15th Annual BACUS Symposium on Photomask Technology and Management; (1995) https://doi.org/10.1117/12.228191
Event: 15th Annual BACUS Symposium on Photomask Technology and Management '95, 1995, Santa Clara, CA, United States

Abstract

Dielectric masks are one of several types of masks used for high energy excimer laser ablation. Excimer laser ablation is a process used to directly pattern materials without the use of resists or wet processing. The dielectric masks are formed from a multilayer stack of dielectric films deposited on a quartz substrate. These masks have low reflectivity in visible light, and the dielectric stack thickness ranges from 0.4 micrometer to 1.0 micrometer to achieve an optimum reflectivity for a specific application. These properties present the most significant challenges in the inspection and quality assurance of dielectric masks. This paper discusses the methods of critical dimension measurement and defect inspection that have been developed for dielectric laser ablation masks. Printability of defects and the application of a unique scanning inspection tool which uses ultraviolet light are discussed. Manufacturing performance data also are presented.

Citation Download Citation

Doris Pulaski, Rajesh S. Patel, and James L. Speidell "Quality assurance of dielectric masks for laser ablation technology", Proc. SPIE 2621, 15th Annual BACUS Symposium on Photomask Technology and Management, (8 December 1995); https://doi.org/10.1117/12.228191

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available