Complex method for the determination of thin absorptive film parameters

A. M. Kostruba; Orest G. Vlokh; R. O. Vlokh

doi:10.1117/12.226161

3 November 1995 Complex method for the determination of thin absorptive film parameters

A. M. Kostruba, Orest G. Vlokh, R. O. Vlokh

Proceedings Volume 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1995) https://doi.org/10.1117/12.226161
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1995, Kiev, Ukraine

Abstract

The new method for the determination of the high absorptive thin film parameters is proposed. This technique consists in the complex ellipsometry plus photometry measurements. The comparison of the principal parameters of the proposed technique and the traditional ellipsometry methods is carried out.

Citation Download Citation

A. M. Kostruba, Orest G. Vlokh, and R. O. Vlokh "Complex method for the determination of thin absorptive film parameters", Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); https://doi.org/10.1117/12.226161

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