Laser patterning and modification of thin YBCO films

Peter A. Atanasov; Rumen I. Tomov; Valery S. Serbezov; A. Grunchev; Lachezar A. Avramov

doi:10.1117/12.232213

11 March 1996 Laser patterning and modification of thin YBCO films

Peter A. Atanasov, Rumen I. Tomov, Valery S. Serbezov, A. Grunchev, Lachezar A. Avramov

Proceedings Volume 2777, ALT'95 International Symposium on Advanced Materials for Optics and Optoelectronics; (1996) https://doi.org/10.1117/12.232213
Event: ALT '95 International Conference: Advanced Materials for Optics and Optoelectronics, 1995, Prague, Czech Republic

Abstract

Comparative study of laser patterning of YBaCuO thin films has been accomplished using XeCl, N₂, Cu, CO₂, and Nd:YAG lasers. Various tracks of different dimensions and shapes have been generated using a computer-controlled X-Y stage. A complete removal of the film material has been achieved. Issues relating to the limit of resolution, annealing of films, and degradation of superconducting properties are discussed for the different lasers used. The cw carbon-dioxide laser has been used for irradiation of the films thus creating 'ex situ' and 'in situ' annealed regions with different film orientation and morphology. The films have been characterized using EDAX, SEM, and RBS.

Citation Download Citation

Peter A. Atanasov, Rumen I. Tomov, Valery S. Serbezov, A. Grunchev, and Lachezar A. Avramov "Laser patterning and modification of thin YBCO films", Proc. SPIE 2777, ALT'95 International Symposium on Advanced Materials for Optics and Optoelectronics, (11 March 1996); https://doi.org/10.1117/12.232213

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