Paper
18 May 1988 Laser Evaporation Deposition Of Superconducting And Semiconducting Thin Films
H. S. Kwok, P. Mattocks, D. T. Shaw, L. Shi, X. W. Wang, S. Witanachchi, Q. Y. Ying, J. P. Zheng, P. Bush
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Abstract
We describe here the deposition of superconducting and semiconducting thin films by the laser evaporation technique. The, characterization of this process, and possible optimization with regards to wavelength and pulse duration of the laser will be discussed. Results of laser interaction experiments will also be described.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. S. Kwok, P. Mattocks, D. T. Shaw, L. Shi, X. W. Wang, S. Witanachchi, Q. Y. Ying, J. P. Zheng, and P. Bush "Laser Evaporation Deposition Of Superconducting And Semiconducting Thin Films", Proc. SPIE 0879, Sensing, Discrimination, and Signal Processing and Superconducting Materials and Intrumentation, (18 May 1988); https://doi.org/10.1117/12.943992
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KEYWORDS
Superconductors

Nd:YAG lasers

Semiconductors

Thin films

Cadmium

Excimer lasers

Continuous wave operation

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