Acoustic control of tip-sample distance for optical near-field microscopy

Bernard Cretin; Etienne Farnault

doi:10.1117/12.250783

18 September 1996 Acoustic control of tip-sample distance for optical near-field microscopy

Bernard Cretin, Etienne Farnault

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250783
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

A new tip-distance control based on near-field acoustics is presented. The interaction between a vibrating tip and the sample enables high accuracy estimation of the distance variation (typically better than 1 nm with a fiber tip). The paper describes the physical interaction between vibrating tip and the object, the principle of regulation loop and shows experimental results obtained in the case of an optical fiber tip used in near-field optical microscopy. The proposed technique can be used to image the topography of the sample or to characterize coupling gas or fluid.

Citation Download Citation

Bernard Cretin and Etienne Farnault "Acoustic control of tip-sample distance for optical near-field microscopy", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250783

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