High-reflectivity surface evaluation in Fizeau phase-stepping interferometry with a Ronchi grid as phase modulator

Benito Vasquez Dorrio; J. Bugarin; Jose M. Alen; Antonio Fernandez; Angel F. Doval; Jose Carlos Lopez Vazquez; Jesus Blanco-Garcia; J. L. Fernandez; Mariano Perez-Amor

doi:10.1117/12.250752

18 September 1996 High-reflectivity surface evaluation in Fizeau phase-stepping interferometry with a Ronchi grid as phase modulator

Benito Vasquez Dorrio, J. Bugarin, Jose M. Alen, Antonio Fernandez, Angel F. Doval, Jose Carlos Lopez Vazquez, Jesus Blanco-Garcia, J. L. Fernandez, Mariano Perez-Amor

Author Affiliations +

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250752
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

The topographic measurement of high reflectivity test surfaces in a Fizeau interferometer using different two-beam phase-stepping algorithms (TBPSA's) is presented. Low pass- filtering the superposition of a multiple-beam Fizeau pattern and a Ronchi grid renders a pattern of sinusoidal profile (the moire image) that contains the Fizeau phase and that can be phase modulated by the in-plane translation of the grid. A set of these phase-shifted moire images can be combined in different TBPSA's in order to calculate the Fizeau phase making clear, at the same time, the sensitivity of the method to use the main phase error sources.

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Benito Vasquez Dorrio, J. Bugarin, Jose M. Alen, Antonio Fernandez, Angel F. Doval, Jose Carlos Lopez Vazquez, Jesus Blanco-Garcia, J. L. Fernandez, and Mariano Perez-Amor "High-reflectivity surface evaluation in Fizeau phase-stepping interferometry with a Ronchi grid as phase modulator", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250752

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