Linear approximation of the coherence function of a white-light source for efficient phase-shifting interferometry

Patrick Sandoz

doi:10.1117/12.250772

18 September 1996 Linear approximation of the coherence function of a white-light source for efficient phase-shifting interferometry

Patrick Sandoz

Author Affiliations +

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250772
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

Ambiguities can arise in measurements with interferometric profilers using monochromatic light in the presence of surface discontinuities larger than a quarter wavelength. In this case, surface profilometry can be performed by means of white light interferometry since the coherent function of the light source allows the identification of the fringe order. However, acquisition procedures and data treatments are more complicated than in the case of monochromatic phase-shifting interferometry. In this paper, the coherence function of the light source is considered as locally linear and new phase shifting algorithms can be derived, which are well adapted to white-light phase-shifting interferometry. First experimental results are presented.

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Patrick Sandoz "Linear approximation of the coherence function of a white-light source for efficient phase-shifting interferometry", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250772

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