Characterization of application-specific probes for SPMs

Marco Tortonese; Michael Kirk

doi:10.1117/12.271229

15 April 1997 Characterization of application-specific probes for SPMs

Marco Tortonese, Michael Kirk

Proceedings Volume 3009, Micromachining and Imaging; (1997) https://doi.org/10.1117/12.271229
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

This paper addresses the problem of determining the absolute force constant of Atomic Force Microscope cantilevers. In the method presented, the cantilever under test is deflected against a reference cantilever of known spring constant. The relative deflection of the two cantilevers is related to their spring constants. The novelty of our approach is in the use of a micromachined reference cantilever of a precisely controlled force constant. Preliminary results show that our method is capable of measuring the force constant of cantilevers in the range of 0.1 to 10 N/m with an accuracy of better than 20%. The error is dominated by the non-linear effects in the force versus distance curves used for the measurement.

Citation Download Citation

Marco Tortonese and Michael Kirk "Characterization of application-specific probes for SPMs", Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); https://doi.org/10.1117/12.271229

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