Advanced concepts for UV laser beam shaping with non-rotationally symmetric optical elements

Lars Unnebrink; Thomas F. E. Henning; Marcus Scholl; Ernst-Wolfgang Kreutz

doi:10.1117/12.281092

18 August 1997 Advanced concepts for UV laser beam shaping with non-rotationally symmetric optical elements

Lars Unnebrink, Thomas F. E. Henning, Marcus Scholl, Ernst-Wolfgang Kreutz

Proceedings Volume 3097, Lasers in Material Processing; (1997) https://doi.org/10.1117/12.281092
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

The potential of non-rotationally symmetric optical elements (NOEs) is demonstrated with respect to mask projection techniques with UV excimer laser radiation. NOEs are diamond turned mirrors with an almost arbitrary surface shape. The operation principle of the NOEs presented here is the concept of beam integration including beamlet shaping. Efficient and innovative processing is enabled by generating complex beam profiles adapted to the mask apertures demonstrated for the generation an annular shaped beam profile.

Citation Download Citation

Lars Unnebrink, Thomas F. E. Henning, Marcus Scholl, and Ernst-Wolfgang Kreutz "Advanced concepts for UV laser beam shaping with non-rotationally symmetric optical elements", Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); https://doi.org/10.1117/12.281092

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available