Optics coatings by magnetron sputtering deposition

Mingli Wang; Zhengxiu Fan

doi:10.1117/12.300652

20 February 1998 Optics coatings by magnetron sputtering deposition

Mingli Wang, Zhengxiu Fan

Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300652
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China

Abstract

This paper reports the multi-layer optics films processed by magnetron sputtering, and investigated the film thickness monitor and the deposition processes control techniques systematically. And successfully makes the coatings of 0.2% reflection in the visible region.

Citation Download Citation

Mingli Wang and Zhengxiu Fan "Optics coatings by magnetron sputtering deposition", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300652

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