Application Of Wafer Probe Techniques To The Evaluation Of Projection Printers

C. P. Ausschnitt; T. A. Brunner; S. C. Yang

doi:10.1117/12.933555

13 September 1982 Application Of Wafer Probe Techniques To The Evaluation Of Projection Printers

C. P. Ausschnitt, T. A. Brunner, S. C. Yang

Proceedings Volume 0334, Optical Microlithography I: Technology for the Mid-1980s; (1982) https://doi.org/10.1117/12.933555
Event: 1982 Microlithography Conferences, 1982, Santa Clara, United States

Abstract

As feature sizes and overlay tolerances shrink to keep pace with the increase in integrated circuit complexity, there is a concomitant need to advance the methods used to characterize and compare the performance of lithographic instruments. The electrical probe measurement technique has emerged as the most accurate, most effective approach to lithographic evaluation. We demonstrate the versatility of the technique as applied to state-of-the-art 1:1 projection printers. Among the characteristics of projection printers discussed are linewidth uniformity, focus and exposure latitude, pellicle mask protection, and distortion and alignment contributions to overlay accuracy.

Citation Download Citation

C. P. Ausschnitt, T. A. Brunner, and S. C. Yang "Application Of Wafer Probe Techniques To The Evaluation Of Projection Printers", Proc. SPIE 0334, Optical Microlithography I: Technology for the Mid-1980s, (13 September 1982); https://doi.org/10.1117/12.933555

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available