PROCEEDINGS VOLUME 0334
1982 MICROLITHOGRAPHY CONFERENCES | 1-2 JANUARY 1982
Optical Microlithography I: Technology for the Mid-1980s
Editor(s): Harry L. Stover
Editor Affiliations +
IN THIS VOLUME

1 Sessions, 33 Papers, 0 Presentations, 0 Posters
All Papers  (33)
1982 MICROLITHOGRAPHY CONFERENCES
1-2 January 1982
Santa Clara, United States
All Papers
James J. Greed Jr., David A. Markle
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933553
D. H. Berry
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933554
C. P. Ausschnitt, T. A. Brunner, S. C. Yang
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933555
Rene Vervoordeldonk, Peter Willemse, Roel Kramer, Tony Cowburn
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933556
Nathan Gold
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933557
P. D. Robertson, F. W. Wise, A. N. Nasr, A. R. Neureuther, C. H. Ting
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933558
Ron Hershel, Ron Voison
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933559
A. Rangappan, Chuck Kao
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933560
Harry L. Stover
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933561
Bruce Heflinger
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933562
Don MacMillen, W. D. Ryden
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933563
Paul Tigreat
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933564
Roel Kramer, Rene Vervoordeldonk, Stefan Wittekoek, Rene Beem, Guido van der Looij
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933565
S. C. Curry, C. B. Friedberg
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933566
D. Leebrick, M. A. Hockey, K. Cummings, J. Greeneich
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933567
H. L. Stover, N. E. David, T. H. Lewis
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933568
Adonis Stephanakis, Harry L. Coleman
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933569
Herbert E. Mayer, Ernst W. Loebach
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933570
Jerris H. Peavey, Stephen Cosentino, Charles Hamner
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933571
John M. Salzer
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933572
Richard L. Bersin, Barry Gelernt
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933573
Sasson Somekh
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933574
M. Exterkamp, W. Wong, H. Damar, A. R. Neureuther, C. H. Ting, W. G. Oldham
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933575
R. F. Leonard, W. F. Cordes III
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933576
Donald C. Hofer, C. Grant Willson, Andrew R. Neureuther, Mark Hakey
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933577
Daikichi Awamura
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933578
Hal Yang
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933579
Steven K. Dunbrack, Gary Burns
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933580
R. A. Simpson, D. E. Davis
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933581
Michael G. Ury, John C. Matthews, Charles H. Wood
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933582
Teruhita Mishima, Kwan C. Kao
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933583
B. J. Lin
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933584
K. Jain, C. G. Willson, B. J. Lin
Proceedings Volume Optical Microlithography I: Technology for the Mid-1980s, (1982) https://doi.org/10.1117/12.933585
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