Paper
14 September 1998 Calibration of the device simulation program suitable for low-temperature application
Wei-Lee Lu, Jah-Hwai Ho, Kun-Fu Tseng, Ting-Hwan Chang, Jenn-Gee Lwo, Luke Su Lu
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Abstract
Temperature dependent mobility in the device simulation program has been used to check whether they are adequate to simulate device characteristics under low temperature operation. The study here shows that although the mobility models in the simulation program can be used to simulate room temperature device characteristics, care should be taken for the low temperature simulation. By substituting the extracted mobility table or the suitable mobility model into the simulation program, better simulation results can be obtained. To this point, we believe that there is still a need to develop a better and more concentrated and temperature dependent mobility model.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wei-Lee Lu, Jah-Hwai Ho, Kun-Fu Tseng, Ting-Hwan Chang, Jenn-Gee Lwo, and Luke Su Lu "Calibration of the device simulation program suitable for low-temperature application", Proc. SPIE 3360, Infrared Readout Electronics IV, (14 September 1998); https://doi.org/10.1117/12.321758
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KEYWORDS
Device simulation

Instrument modeling

Scattering

Calibration

Doping

Measurement devices

Temperature metrology

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