NIST virtual/physical random-profile roughness calibration standards

Jun-Feng Song; Christopher J. Evans; M. McGlauflin; E. Whitenton; Theodore V. Vorburger; Y. Yuan

doi:10.1117/12.328457

30 October 1998 NIST virtual/physical random-profile roughness calibration standards

Jun-Feng Song, Christopher J. Evans, M. McGlauflin, E. Whitenton, Theodore V. Vorburger, Y. Yuan

Proceedings Volume 3426, Scattering and Surface Roughness II; (1998) https://doi.org/10.1117/12.328457
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

The NIST (National Institute of Standards and Technology) virtual/physical surface roughness calibration standard consists of physical specimens whose surfaces are manufactured by a numerically controlled diamond-turning process using digitized profiles. These standards are designed for checking the characteristics and algorithms of surface measuring systems, and for sensing the amount of distortion of the surface information flow though different measuring systems. The digitized profiles can also be used for remote instrument calibration and surface measurement unification. The design, manufacture, test results, and potential uses of the NIST prototype specimens are discussed.

Citation Download Citation

Jun-Feng Song, Christopher J. Evans, M. McGlauflin, E. Whitenton, Theodore V. Vorburger, and Y. Yuan "NIST virtual/physical random-profile roughness calibration standards", Proc. SPIE 3426, Scattering and Surface Roughness II, (30 October 1998); https://doi.org/10.1117/12.328457

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