Specular and diffuse x-ray scattering from tungsten/carbon multilayers having a high reflectivity at 10 keV

Albert T. Macrander; Randall L. Headrick; Chian Liu; Jenny Erdmann; Ali M. Khounsary; Karl W. Smolenski; S. Felix Krasnicki; Jozef Maj

doi:10.1117/12.332517

11 December 1998 Specular and diffuse x-ray scattering from tungsten/carbon multilayers having a high reflectivity at 10 keV

Albert T. Macrander, Randall L. Headrick, Chian Liu, Jenny Erdmann, Ali M. Khounsary, Karl W. Smolenski, S. Felix Krasnicki, Jozef Maj

Author Affiliations +

Proceedings Volume 3448, Crystal and Multilayer Optics; (1998) https://doi.org/10.1117/12.332517
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

X-ray scattering measurements at 10 keV from multilayers having a period of 24.8 Angstrom and consisting of 100 W/C bilayers are reported. Specular scans revealed first order reflectivities in the range 73.5% to 78.0% with bandpasses in the range of 1.5% to 1.7%. Total roughness (or interface grading) values deduced from fitting were in the range 2.5 to 3.0 angstrom for the last-to-grow surface of the W layers. Diffuse scattering measurements were made in a novel geometry that permitted investigation of in-plane momentum transfers up to 0.2 Angstrom^-1. This is roughly an order of magnitude larger than is possible in conventional rocking scans. A power law dependence of the diffuse scattering after integration over a 'Brillioun zone' is found. The exponent of this power law, 1.75, when interpreted using a logarithmic correlation function leads to a value of 1.0 angstrom for the correlated roughness.

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Albert T. Macrander, Randall L. Headrick, Chian Liu, Jenny Erdmann, Ali M. Khounsary, Karl W. Smolenski, S. Felix Krasnicki, and Jozef Maj "Specular and diffuse x-ray scattering from tungsten/carbon multilayers having a high reflectivity at 10 keV", Proc. SPIE 3448, Crystal and Multilayer Optics, (11 December 1998); https://doi.org/10.1117/12.332517

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