More-effective troubleshooting using data collection on etch equipment: case studies

James Durham; Steve Felker; Steven F. Shelton

doi:10.1117/12.324364

3 September 1998 More-effective troubleshooting using data collection on etch equipment: case studies

James Durham, Steve Felker, Steven F. Shelton

Proceedings Volume 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV; (1998) https://doi.org/10.1117/12.324364
Event: Microelectronic Manufacturing, 1998, Santa Clara, CA, United States

Abstract

The complexity of semiconductor equipment and processes drives the need for equally complex troubleshooting systems. Advanced data collection software allows the user to collect and store data and review individual wafer information or wafer data trends has become an effective tool for troubleshooting. Situations that are extremely difficult to troubleshoot without the ability to retrieve process data include intermittent equipment malfunctions, problems found during subsequent processing or inspections, and problems detected at probe. Data collection and archiving gives maintenance and engineering the opportunity to analyze the data long after the process is complete. Analysis of the data often leads to solutions that will prevent another occurrence. This paper includes fiber case studies from a previous paper, plus an additional five case studies that are used to display the effective utilization of data collection for troubleshooting complex problems.

Citation Download Citation

James Durham, Steve Felker, and Steven F. Shelton "More-effective troubleshooting using data collection on etch equipment: case studies", Proc. SPIE 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV, (3 September 1998); https://doi.org/10.1117/12.324364

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