Coherent macro porous silicon as a wick structure in an integrated microfluidic two-phase cooling system

Alexander Holke; Jorg Pilchowski; H. Thurman Henderson; Ahed Saleh; Michael Kazmierczak; Frank M. Gerner; Karl Baker

doi:10.1117/12.322077

10 September 1998 Coherent macro porous silicon as a wick structure in an integrated microfluidic two-phase cooling system

Alexander Holke, Jorg Pilchowski, H. Thurman Henderson, Ahed Saleh, Michael Kazmierczak, Frank M. Gerner, Karl Baker

Author Affiliations +

Proceedings Volume 3515, Microfluidic Devices and Systems; (1998) https://doi.org/10.1117/12.322077
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

This paper reports a new concept of building a coherent porous wick structure in planar silicon wafers for capillary pumping in Loop Heat Pipes (LHPs). By utilizing Macro Porous Silicon (MPS) fabrication technology, with pore sizes in the order of a micron, precise control of the pore dimensions of the wick is possible. In addition, by using MEMS (Micro Electro Mechanical Systems) fabrication technology, LHPs can ultimately be integrated into electronic packaging systems, or indeed into the silicon microchips themselves. The MPS samples were fabricated and tested for capillary pressure and permeability. The test results closely matched the analytical models that were derived from basic physics.

Citation Download Citation

Alexander Holke, Jorg Pilchowski, H. Thurman Henderson, Ahed Saleh, Michael Kazmierczak, Frank M. Gerner, and Karl Baker "Coherent macro porous silicon as a wick structure in an integrated microfluidic two-phase cooling system", Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); https://doi.org/10.1117/12.322077

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