Noise analysis and a comparative study of noise in MEMS and MOEMS

Ananth Selvarajan; S. K. Anand

doi:10.1117/12.354293

20 July 1999 Noise analysis and a comparative study of noise in MEMS and MOEMS

Ananth Selvarajan, S. K. Anand

Proceedings Volume 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS; (1999) https://doi.org/10.1117/12.354293
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

In recent years Micro Electro mechanical systems (MEMS) and micro opto electro mechanical systems (MOEMS) have grown in importance, especially in smart structure applications. In this paper a theoretical comparative study is made analyzing three different types of micro pressure sensors. MEMS type pressure sensors of the piezo-resistive and capacitive type are considered along with MOEM pressure sensor of the Fabry- Perot interferometric type. It is found that piezo resistive and capacitive pressure sensors in the micro form attain improved noise performance as compared to their bulk counterparts. The opto-mechanical sensors shows better noise performance than the capacitive sensor, when the limiting noise is due to Brownian motion.

Citation Download Citation

Ananth Selvarajan and S. K. Anand "Noise analysis and a comparative study of noise in MEMS and MOEMS", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354293

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