Process and performance optimization of bottom antireflective coatings: II

Shuji Ding; John P. Sagan; Jianhui Shan; Eleazar Gonzalez; Sunit S. Dixit; Ying Liu; Dinesh N. Khanna

doi:10.1117/12.350152

11 June 1999 Process and performance optimization of bottom antireflective coatings: II

Shuji Ding, John P. Sagan, Jianhui Shan, Eleazar Gonzalez, Sunit S. Dixit, Ying Liu, Dinesh N. Khanna

Proceedings Volume 3678, Advances in Resist Technology and Processing XVI; (1999) https://doi.org/10.1117/12.350152
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

The newly developed AZ BARLi II coating material is a photoresist solvent-based bottom antireflective coating (BARC) for i-line lithographic application. The coating material has good compatibility with common edge bead removal solvents such as ethyl lactate, PGME, or PGMEA mixed with ethyl lactate or PGME. To evaluate the BARC material, its chemical compatibility with common EBR solvents has been tested by several analytical techniques including liquid particle counts and surface defect studies. Both top and bottom EBR dispense processes have been investigated and optimized. Improvements on edge roughness, visual cleanliness, and the BARC coating buildup at the edge will be discussed in this paper.

Citation Download Citation

Shuji Ding, John P. Sagan, Jianhui Shan, Eleazar Gonzalez, Sunit S. Dixit, Ying Liu, and Dinesh N. Khanna "Process and performance optimization of bottom antireflective coatings: II", Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); https://doi.org/10.1117/12.350152

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available