Challenge to sub-0.1-um pattern fabrication using an alternating phase-shifting mask in ArF lithography

Takahiro Matsuo; Keisuke Nakazawa; Tohru Ogawa

doi:10.1117/12.354342

26 July 1999 Challenge to sub-0.1-μm pattern fabrication using an alternating phase-shifting mask in ArF lithography

Takahiro Matsuo, Keisuke Nakazawa, Tohru Ogawa

Proceedings Volume 3679, Optical Microlithography XII; (1999) https://doi.org/10.1117/12.354342
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

We have developed ArF excimer laser lithography using an alternating phase-shifting mask (PSM) for sub-0.10 micrometers logic device fabrication. The requirement of phase accuracy is discussed on the 0.10micrometers isolated and dense line patterns. It is found that the phase accuracy of +/- 2 degrees is required in order to obtain the sufficient process margin and minimize the CD difference between the nonshifter portion and the shifter portion. The 0.07micrometers by optimizing the phase shift on the dual-trench type PSM. We have also confirmed the fabrication of the 0.05micrometers isolated and semi-dense line patterns. The 0.05micrometers line patterns could be attained with the sufficient processing margin, if the resist performance is further improved. Furthermore, we have investigated the effect of mask bias to the isolated line pattern. It has been demonstrated that the DOF is improved from 0.65(Mu) m to 0.8micrometers by adding the mask bias of 0.02micrometers to the 0.10micrometers isolated line pattern, because the mask bias makes the pivotal point controllable.

Citation Download Citation

Takahiro Matsuo, Keisuke Nakazawa, and Tohru Ogawa "Challenge to sub-0.1-μm pattern fabrication using an alternating phase-shifting mask in ArF lithography", Proc. SPIE 3679, Optical Microlithography XII, (26 July 1999); https://doi.org/10.1117/12.354342

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available