Numeric investigation of vibrating microcantilever using Matlab/Simulink

Arturas Ulcinas; Valentinas J. Snitka; Mindaugas Rackaitis

doi:10.1117/12.341222

10 March 1999 Numeric investigation of vibrating microcantilever using Matlab/Simulink

Arturas Ulcinas, Valentinas J. Snitka, Mindaugas Rackaitis

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341222
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Simple Matlab/Simulink model is presented allowing to simulate numerically the dynamics of surface coupled cantilever in wide frequency range. Contact interaction between surface and cantilever is estimated by nonlinear distance function. Simulations show that cantilever can retain the harmonic response to the sine excitation above its fundamental resonant frequency due to its small mass and spring constant and strong surface adhesion forces. The motion of the cantilever becomes chaotic at certain combinations of amplitude and frequency of excitation, as cantilever and surface lose contact. Frequency spectrum of cantilever deflection contains high frequency component corresponding to the nonlinear surface-cantilever contact spring and dependent on the surface material parameters.

Citation Download Citation

Arturas Ulcinas, Valentinas J. Snitka, and Mindaugas Rackaitis "Numeric investigation of vibrating microcantilever using Matlab/Simulink", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341222

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