Electrical and optical properties of indium tin oxide films prepared by pulsed magnetron sputtering

Hui-Wen Chou; W. J. Lee; Rung-Ywan Tsai; Yuen Keun Fang; C. C. Chen

doi:10.1117/12.360113

7 September 1999 Electrical and optical properties of indium tin oxide films prepared by pulsed magnetron sputtering

Hui-Wen Chou, W. J. Lee, Rung-Ywan Tsai, Yuen Keun Fang, C. C. Chen

Proceedings Volume 3738, Advances in Optical Interference Coatings; (1999) https://doi.org/10.1117/12.360113
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

Indium tin oxide (ITO) thin films were prepared by unipolar and bipolar dc-pulsed magnetron sputtering in a mixture of argon and oxygen onto the unheated glass substrates. The target of ITO with 10 weight percent tin is used. The influences of polar modes, output frequencies, and on times and off times on the optical, electrical and structural properties of ITO films are investigated. The correlations between the deposition parameters and the film properties are discussed. An optimal condition based on the polar mode and frequency of reactive dc-pulsed sputtering for obtaining the high transmittance and low resistivity of ITO films is suggested.

Citation Download Citation

Hui-Wen Chou, W. J. Lee, Rung-Ywan Tsai, Yuen Keun Fang, and C. C. Chen "Electrical and optical properties of indium tin oxide films prepared by pulsed magnetron sputtering", Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); https://doi.org/10.1117/12.360113

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available