Micro cycloid-gear system fabricated by multiexposure LIGA technique

Toru Hirata; Song-Jo Chung; Herbert Hein; Tomoyuki Akashi; Juergen Mohr

doi:10.1117/12.360468

3 September 1999 Micro cycloid-gear system fabricated by multiexposure LIGA technique

Toru Hirata, Song-Jo Chung, Herbert Hein, Tomoyuki Akashi, Juergen Mohr

Proceedings Volume 3875, Materials and Device Characterization in Micromachining II; (1999) https://doi.org/10.1117/12.360468
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

In this paper, a prototype of 2 mm-diameter micro-cycloid gear system fabricated by the multi-exposure LIGA technique is presented. The entire gear system consists of a casing and three vertically stacked disks and gears. Each part is composed of three different levels. The first level, 40 micrometers high, was fabricated by UV-lithography, and the second as well as the third level, 195 micrometers and 250 micrometers high respectively, were processed by aligned deep X-ray lithography (DXL). The alignment error between two DXL- processed layers was measured, and the results have turned out to be within +/- 5 micrometers range. As a result of the height control process by the mechanical surface machining, the deviation of structural height has been maintained within +/- 3 micrometers range for the UV-lithography-processed structures, and +/- 10 micrometers for the DXL-processed structures. Further the tests of gear assembly were implemented with 125 micrometers -diameter glass fiber, by using a die-bonding machine with vacuum gripper under stereo- microscope. Finally the dynamic tests of the gear system were successfully conducted with the mechanical torque input by an electrical motor. A proper rotational speed reduction was observed in the operational input range of 3 to 1500 rpm with the designed gear ratio of 18.

Citation Download Citation

Toru Hirata, Song-Jo Chung, Herbert Hein, Tomoyuki Akashi, and Juergen Mohr "Micro cycloid-gear system fabricated by multiexposure LIGA technique", Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); https://doi.org/10.1117/12.360468

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