Micro-opto-electro-mechanical (MOEM) vibration sensor

Ananth Selvarajan; Prasant Kumar Pattnaik; Vishwa Murti Gupta; Talabuttala Srinivas

doi:10.1117/12.388925

21 June 2000 Micro-opto-electro-mechanical (MOEM) vibration sensor

Ananth Selvarajan, Prasant Kumar Pattnaik, Vishwa Murti Gupta, Talabuttala Srinivas

Proceedings Volume 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS; (2000) https://doi.org/10.1117/12.388925
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

The combination of Integrated Optics with micro-mechanical structures on silicon offers immense potential for smart structure applications. One such application is sensing and mapping of vibration and vibrational modes. In the present proposal, a cantilever formed by bulk micro machining of (100). Silicon and optical waveguides formed by sol-gel process is considered. Among the various configurations possible, an optical directional coupler located close to foot of the cantilever is analyzed in detail. Analytical and simulation result using optical coupled mode theory to obtain the power transfer that is dependent on cantilever vibrations are presented.

Citation Download Citation

Ananth Selvarajan, Prasant Kumar Pattnaik, Vishwa Murti Gupta, and Talabuttala Srinivas "Micro-opto-electro-mechanical (MOEM) vibration sensor", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388925

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