Optimally curved electrodes for a rotary microactuator

Sunghwan Jung; Jong up Jeon; Y. Eugene Pak; Sukhan Lee

doi:10.1117/12.388920

21 June 2000 Optimally curved electrodes for a rotary microactuator

Sunghwan Jung, Jong up Jeon, Y. Eugene Pak, Sukhan Lee

Proceedings Volume 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS; (2000) https://doi.org/10.1117/12.388920
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

The rotary electro-static micro actuators integrating optimally curved electrodes are proposed to enhance the actuating force-generation capability. The results show that the actuating force-generation capability. The results show that the actuating force generated by the prosed design is more than 5 times greater than the conventional shape for the application of hard disk drive device. Also, the results indicate that, as the smaller gap size is allowable, the force generation capability will be dramatically enhanced. In this design the uniformity in the capacitive gap size is the additional feature to be in favor of fabrication of a micro-actuator.

Citation Download Citation

Sunghwan Jung, Jong up Jeon, Y. Eugene Pak, and Sukhan Lee "Optimally curved electrodes for a rotary microactuator", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388920

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