CAR blanks feasibility study results

Yasunori Yokoya; Hideo Kobayashi; Takao Higuchi; Keishi Asakawa; Akinori Kurikawa; Tadashi Sakurai; Masahiro Hashimoto; Fumiko Ota

doi:10.1117/12.377099

3 February 2000 CAR blanks feasibility study results

Yasunori Yokoya, Hideo Kobayashi, Takao Higuchi, Keishi Asakawa, Akinori Kurikawa, Tadashi Sakurai, Masahiro Hashimoto, Fumiko Ota

Author Affiliations +

Proceedings Volume 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2000) https://doi.org/10.1117/12.377099
Event: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 1999, Munich, Germany

Abstract

Appearance of e-beam exposure tools with a high acceleration voltage has created a growing need for a chemically amplified resist (CAR) system with high sensitivity, high contrast, superior resolution and superior post-coating delay stability. While mask-makers have been procuring resist-coated photomask blanks, it is generally considered that CARs must be spin-coated just prior to exposure due to its short shelf-life after coating. However, the industry would like to continue procuring pre-CAR-coated blanks from a blanks supplier, who also intends to support mask-makers in this way. This paper describes the results of a feasibility study on mask blanks coated with CARs for advanced e-beam reticle fabrication.

Citation Download Citation

Yasunori Yokoya, Hideo Kobayashi, Takao Higuchi, Keishi Asakawa, Akinori Kurikawa, Tadashi Sakurai, Masahiro Hashimoto, and Fumiko Ota "CAR blanks feasibility study results", Proc. SPIE 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (3 February 2000); https://doi.org/10.1117/12.377099

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