Automated Control Of Optical Layer Fabrication Processes

R. Herrmann; A. Zoller

doi:10.1117/12.935506

28 November 1983 Automated Control Of Optical Layer Fabrication Processes

R. Herrmann, A. Zoller

Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935506
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

An automated control system for evaporation and sputtering plants is presented. It consists of an optical monitoring system (OMS 2000) and a control unit (LEYCOM) based on a 16 bit microprocessor.This system has been successfully in operation since three years. The OMS 2000 is a single wavelength monitoring system designed for measuring the reflectance or transmittance of a test glass during deposition of the coating. It has the additional capability of terminating the evaporation when a preselected intensity value is reached or when the measured intensity passes through an extremum. Different optical monitoring methods, which can be executed with the OMS 2000, are discussed with respect to their error compensation effect. When using a special 6 fold test glass changer a special monitoring method is possible which makes monitoring of non-quarterwave layer systems rather easy and which exhibits a useful error compensation effect for edge filters.

Citation Download Citation

R. Herrmann and A. Zoller "Automated Control Of Optical Layer Fabrication Processes", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935506

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