Semiconducting YBCO bolometers for uncooled IR detection

Mahmoud F. Almasri; Donald P. Butler; Zeynep Celik-Butler

doi:10.1117/12.391744

17 July 2000 Semiconducting YBCO bolometers for uncooled IR detection

Mahmoud F. Almasri, Donald P. Butler, Zeynep Celik-Butler

Proceedings Volume 4028, Infrared Detectors and Focal Plane Arrays VI; (2000) https://doi.org/10.1117/12.391744
Event: AeroSense 2000, 2000, Orlando, FL, United States

Abstract

Amorphous semiconducting Y-Ba-Cu-O is attractive as the temperature sensitive element for uncooled IR bolometers and pyroelectric detectors. Thin films can be easily fabricated by RF magnetron sputtering at room temperature from a composite target. It is compatible with micromachining techniques for the fabrication of thermally isolated structures. As a bolometer, Y-Ba-Cu-O possesses a relatively high temperature coefficient of resistance of 3.5% K^-1 near room temperature. This paper will present the IR characteristics of 40-micrometer X 40-micrometer microbolometer arrays fabricated in thermal isolation structures. These detectors are aimed at thermal imaging at 10-micrometer wavelength. Recently, self-supporting YBaCuO pixels have been developed. In this case, the Y-Ba-Cu-O thin film pixel requires no underlying bridge material to provide structural support. The Y-Ba-Cu-O thin film is supported solely by the electrode arms. Responsivity and detectivity greater than 4 X 10³ V/W and 10⁸ cmHz^1/2/W respectively have been measured in these detectors. The development of large area 1.5-mm and 0.4- mm square YBaCuO bolometers for NASA's global warming studies in low-orbiting satellites will also be presented. These large area detectors require large optical bandwidths covering the 0.3-micrometer to 100-micrometer wavelength band.

Citation Download Citation

Mahmoud F. Almasri, Donald P. Butler, and Zeynep Celik-Butler "Semiconducting YBCO bolometers for uncooled IR detection", Proc. SPIE 4028, Infrared Detectors and Focal Plane Arrays VI, (17 July 2000); https://doi.org/10.1117/12.391744

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