Overview of novel approaches for laser microfabrication of advanced materials

Koji Sugioka

doi:10.1117/12.413749

30 January 2001 Overview of novel approaches for laser microfabrication of advanced materials

Koji Sugioka

Proceedings Volume 4157, Laser-Assisted Microtechnology 2000; (2001) https://doi.org/10.1117/12.413749
Event: Laser-Assisted Microtechnology 2000, 2000, St. Petersburg-Pushkin, Russian Federation

Abstract

Laser processing is quite attractive for micromachining, microstructuring, and modification of materials. Conventional laser processing using IR, visible, or UV lasers, however, cannot realize precision microfabrication of advanced materials such as fused silica, quartz, sapphire, diamond, SiC, GaN, etc. Novel laser processing is recent topics for microprocessing of these materials. In this paper, such novel approaches are reviewed.

Citation Download Citation

Koji Sugioka "Overview of novel approaches for laser microfabrication of advanced materials", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); https://doi.org/10.1117/12.413749

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available