Thickness-dependent optical and dielectric behaviors of low-k polymer thin films

Hyungkun Kim; Frank G. Shi; Bin Zhao; Maureen R. Brongo

doi:10.1117/12.395718

18 August 2000 Thickness-dependent optical and dielectric behaviors of low-k polymer thin films

Hyungkun Kim, Frank G. Shi, Bin Zhao, Maureen R. Brongo

Proceedings Volume 4181, Challenges in Process Integration and Device Technology; (2000) https://doi.org/10.1117/12.395718
Event: Microelectronic Manufacturing, 2000, Santa Clara, CA, United States

Abstract

A study of both thickness dependent optical and dielectric properties of a low-dielectric constant polycrystalline polymer thin film is investigated. It is demonstrated that the refractive index increase with increasing film thickness, but for thickness < 200 nm, abnormal decrease of the refractive index with increasing film thickness is observed. It is also found that the dielectric strength has a strong dependance on film thickness, which decrease with increasing film thickness. Optical spectroscopy and current ramping voltage test are involved to investigate thickness dependence of optical and dielectric properties. The observations are discussed in terms of our and other models for film thickness dependent of dielectric strength as well as refractive index.

Citation Download Citation

Hyungkun Kim, Frank G. Shi, Bin Zhao, and Maureen R. Brongo "Thickness-dependent optical and dielectric behaviors of low-k polymer thin films", Proc. SPIE 4181, Challenges in Process Integration and Device Technology, (18 August 2000); https://doi.org/10.1117/12.395718

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