Micro/nanofactory: concept and state of the art

Jean-Marc Breguet; Carl Schmitt; Reymond Clavel

doi:10.1117/12.403687

11 October 2000 Micro/nanofactory: concept and state of the art

Jean-Marc Breguet, Carl Schmitt, Reymond Clavel

Proceedings Volume 4194, Microrobotics and Microassembly II; (2000) https://doi.org/10.1117/12.403687
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States

Abstract

A Microfactory is a set of cooperating micro-machines dedicated to the production of Microsystems in small to medium quantities. This paper describes the Microfactory concept currently developed at the Institut de Systemes Robotiques (ISR). A state of the art in this domain is presented. Several novel designs on micro-positioning systems are discussed. Emphasis is put on piezo-actuators with nanometer resolution and large workspaces (few cm³). Finally, our vision for the future trends in the field of Microfactory is briefly introduced.

Citation Download Citation

Jean-Marc Breguet, Carl Schmitt, and Reymond Clavel "Micro/nanofactory: concept and state of the art", Proc. SPIE 4194, Microrobotics and Microassembly II, (11 October 2000); https://doi.org/10.1117/12.403687

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