Fast 3D measurement method for multibeam confocal system and system error calibrating

Bing Kong; Zhao Wang; Yushan Tan; Ning Mi

doi:10.1117/12.403877

10 October 2000 Fast 3D measurement method for multibeam confocal system and system error calibrating

Bing Kong, Zhao Wang, Yushan Tan, Ning Mi

Proceedings Volume 4222, Process Control and Inspection for Industry; (2000) https://doi.org/10.1117/12.403877
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

The multi-beam confocal system has been an important 3D measurement because of its peculiarity of non-contact, high precision and high speed. In this paper, an interpolation technique is studied, and a fast method to get the 3D profile adapted to the multi-beam confocal system is inferred. Compared with the usual method, the fast method uses more sampling information, so higher precision can be gotten at the given sampling distance. Theoretic analysis shows that 1 micron measurement precision can be reached while the axial sampling distance is 22 micron and NA is 0.12. However, since large angular field is used, the focal plan of the system is concave and the curve degree is often larger than measurement precision, unless the system must be designed strictly. Conicoid fitting technique is adopted to calibrate the error, and experiment indicated the method is useful for error revision.

Citation Download Citation

Bing Kong, Zhao Wang, Yushan Tan, and Ning Mi "Fast 3D measurement method for multibeam confocal system and system error calibrating", Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); https://doi.org/10.1117/12.403877

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