Investigation of process latitude in e-beam lithography for positive CAR UVIII using novel volumetric linewidth measurement

Vladimir A. Kudryashov; Philip D. Prewett; Alan G. Michette

doi:10.1117/12.404847

20 October 2000 Investigation of process latitude in e-beam lithography for positive CAR UVIII using novel volumetric linewidth measurement

Vladimir A. Kudryashov, Philip D. Prewett, Alan G. Michette

Author Affiliations +

Proceedings Volume 4226, Microlithographic Techniques in Integrated Circuit Fabrication II; (2000) https://doi.org/10.1117/12.404847
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

An application of a simple and low-cost novel volumetric linewidth measurement technique to e-beam lithography process optimization for the positive CAR UVIII demonstrates clearly its efficiency and accuracy. It helps to optimize exposure, PEB and development procedure to get the highest possible process latitude. For this optimized procedure structure linewidth does not exceed 10% for a 20% exposure variation. PEB temperature and time deviation for 1 degree(s)C and 1 second lead to a 0.5 nm and a 2.5 nm linewidth run-out correspondingly.

Citation Download Citation

Vladimir A. Kudryashov, Philip D. Prewett, and Alan G. Michette "Investigation of process latitude in e-beam lithography for positive CAR UVIII using novel volumetric linewidth measurement", Proc. SPIE 4226, Microlithographic Techniques in Integrated Circuit Fabrication II, (20 October 2000); https://doi.org/10.1117/12.404847

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available