AFM length analysis of data marks: measuring jitter, asymmetry, process noise, and process position

Donald A. Chernoff; David L. Burkhead

doi:10.1117/12.453421

10 January 2002 AFM length analysis of data marks: measuring jitter, asymmetry, process noise, and process position

Donald A. Chernoff, David L. Burkhead

Proceedings Volume 4342, Optical Data Storage 2001; (2002) https://doi.org/10.1117/12.453421
Event: Optical Data Storage, 2001, Santa Fe, NM, United States

Abstract

We describe statistical analysis of AFM measurements of bump size, shape and position on DVD stampers. We present statistical concepts that lead to useful measurements of process position and process noise. These physical measurements are compared with key electrical measurements such as asymmetry and jitter.

Citation Download Citation

Donald A. Chernoff and David L. Burkhead "AFM length analysis of data marks: measuring jitter, asymmetry, process noise, and process position", Proc. SPIE 4342, Optical Data Storage 2001, (10 January 2002); https://doi.org/10.1117/12.453421

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