Quantitative optical measurement of microcantilever vibration: applications to near-field microsensor

Pascal Vairac; Rodrigue Rousier; Raphail Patois; Bernard Cretin

doi:10.1117/12.445591

23 October 2001 Quantitative optical measurement of microcantilever vibration: applications to near-field microsensor

Pascal Vairac, Rodrigue Rousier, Raphail Patois, Bernard Cretin

Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001) https://doi.org/10.1117/12.445591
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

Optical measuring techniques in MEMS are attractive ways of detection and reproducible methods. Applications of appropriate optical measuring techniques can be found in many situations: local study of materials constants, characterization of micromechanical systems, vibration analysis, and environmental behavior.

Citation Download Citation

Pascal Vairac, Rodrigue Rousier, Raphail Patois, and Bernard Cretin "Quantitative optical measurement of microcantilever vibration: applications to near-field microsensor", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); https://doi.org/10.1117/12.445591

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