High-speed sinusoidal phase-modulating laser diode interferometer with a feedback control to eliminate external disturbance

Takamasa Suzuki; Toshiyuki Maki; Osami Sasaki

doi:10.1117/12.427093

8 May 2001 High-speed sinusoidal phase-modulating laser diode interferometer with a feedback control to eliminate external disturbance

Takamasa Suzuki, Toshiyuki Maki, Osami Sasaki

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Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427093
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan

Abstract

A surface profiler incorporating a feedback controller that eliminates external disturbances is proposed and demonstrated. Its overall performance is dependent upon the frequency response of the feedback loop. The frequency of modulating signal strongly influences response of the feedback controller. When using an integrating bucket method, however, the CCD camera must be operated at the NTSC-approved modulating frequency. Our technique uses electronic shutter equipped CCD camera. The shutter function enables us to apply high-speed sinusoidal phase modulation to the conventional integrating bucket method under the NTSC standards.

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Takamasa Suzuki, Toshiyuki Maki, and Osami Sasaki "High-speed sinusoidal phase-modulating laser diode interferometer with a feedback control to eliminate external disturbance", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.427093

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KEYWORDS

Modulation

Signal detection

CCD cameras

Feedback control

Interferometers

Camera shutters

Semiconductor lasers

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