Paper
14 November 2001 Performance of the SPring-8 modular piezoelectric bimorph mirror prototype
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Abstract
This paper reports on the performances of a test prototype mirror, based on the Piezoelectroic Bimorph Mirror technology, which has been designed and manufactured (in collaboration with the French optical company SESO) for the national Japanese 8 GeV storage ring Spring-8. The device consists of two 150 mm long modules assembled side-by-side. It exhibits superior surface quality with respect to previously manufactured long piezoelectric bimorph mirrors, as the junctions between modules do not introduce any distortion on the reflecting surface. The mirror can effectively compensate low frequency components of the figure error/waviness left by polishing. Two different simple optimisation methods have been validated: ex-situ in the metrology lab (Adaptive Optics correction and control algorithm) and, for the first time, in-situ at the beamline (Hartmann test). After optimisation with coherent x-rays at the 1 km long SPring-8 beamline, elliptical shaping was achieved with sub (mu) rad level precision for the slope error rms. The associated height error is as small as 8 nm rms. over 200 mm illuminated length. An extremely sharp gaussian 8 micrometers FWHM wide spot size was obtained by vertically demagnifying the undulator source. It has also been demonstrated that it is possible to bend the mirror to an arbitrary, user-defined, shape; i.e. sinusoidal.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Riccardo Signorato, Jean-Francois Carre, and Tetsuya Ishikawa "Performance of the SPring-8 modular piezoelectric bimorph mirror prototype", Proc. SPIE 4501, X-Ray Mirrors, Crystals, and Multilayers, (14 November 2001); https://doi.org/10.1117/12.448501
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Cited by 9 scholarly publications.
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KEYWORDS
Mirrors

Electrodes

Prototyping

Adaptive optics

Metrology

Polishing

X-rays

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