Dr. Tetsuya Ishikawa Profile

Dr. Tetsuya Ishikawa

Director at RIKEN SPring-8 Ctr

SPIE Involvement:

Conference Chair | Author

Publications (80)

Proceedings Article | 9 June 2023 Presentation + Paper

Fabrication of atomically precise, super smooth, and damage-free x-ray optics

Pho Bui, Masahiko Kanaoka, Makina Yabashi, Tetsuya Ishikawa, Yasuhisa Sano, Kazuto Yamauchi

Proceedings Volume 12581, 1258109 (2023) https://doi.org/10.1117/12.2668438

KEYWORDS: Surface roughness, Optical surfaces, Surface finishing, Mirror surfaces, X-ray optics, Fabrication, Etching, Polishing, Optics manufacturing, X-rays

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An atomically precise, super smooth, and damage-free surface is highly demanded for x-ray mirrors, multilayer optics, channel-cut crystal monochromators (CCM), and gratings. An ultra-precision optic with a figure error of several nm is crucial for single-nanometer spatial resolution, signal strength, and contrast. Moreover, sub-angstrom root-mean-square surface roughness is beneficial for high reflectivity and the lowest unwanted scattering. Additionally, a damage-free surface with no alter layer is greatly desired for CCM and grating substrates because it is essential for the high reflectivity of the CCM and the uniform etching rate of the grating’s ruling. In the manufacturing of x-ray mirrors, to obtain the desired figure error, a non-contact figuring method, such as ion beam figuring (IBF), plasma chemical vaporization machining (PCVM), or Elastic Emission Machining (EEM), is usually employed thanks to its high controllability and stability. EEM has proved the best performance in terms of achieving a low figure error and maintaining a good surface roughness. After shaping/figuring, a finishing method is usually applied to improve its surface roughness without distorting its figure error. Recently, Catalyst-Referred Etching (CARE) has realized its potential and applicability to x-ray mirror manufacturing as a finishing method. Thanks to its removal mechanism, a highly ordered surface with a root-mean-square of 0.03 nm RMS is attained. In the polishing of a CCM, because a mechanical method is usually used to polish its surface at the narrow gap, the residual mechanical damage induced a low reflectivity and low spatial resolution. PCVM with a wire electrode has recently been proposed and demonstrated its excellent performance. The damage-free surface of a CCM with a gap of less than 100µm has been successfully realized by PCVM. In this paper, recent achievements in figuring (EEM), surface finishing (CARE), and damage removal (PCVM) are presented and discussed.

Proceedings Article | 1 August 2021 Presentation

Image-based wavefront measurement for full-field x-ray microscopy

Yuto Tanaka, Satoshi Matsuyama, Takato Inoue, Nami Nakamura, Jumpei Yamada, Yoshiki Kohmura, Makina Yabashi, Kazuhiko Omote, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11839, 118390A (2021) https://doi.org/10.1117/12.2595026

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Proceedings Article | 1 August 2021 Presentation

Optimization of mirror deformation strategy using mechanical and piezoelectric bending system

Takato Inoue, Yuka Nishioka, Satoshi Matsuyama, Junki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Lahsen Assoufid, Kazuto Yamauchi

Proceedings Volume 11837, 118370B (2021) https://doi.org/10.1117/12.2594944

KEYWORDS: Mirrors, Deformable mirrors, X-rays, Zoom lenses, X-ray optics, Synchrotron radiation, Statistical analysis, Control systems, Beam controllers

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Proceedings Article | 22 August 2020 Presentation

Development of x-ray mirrors for XFEL sub-10 nm focusing system based on Wolter type III geometry

Takato Inoue, Jumpei Yamada, Satoshi Matsuyama, Nami Nakamura, Taito Osaka, Hirokatsu Yumoto, Takahisa Koyama, Haruhiko Ohashi, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11491, 114910B (2020) https://doi.org/10.1117/12.2566856

KEYWORDS: Mirrors, X-rays, X-ray lasers, Free electron lasers, Spatial coherence, Nonlinear optics, X-ray optics, Complex systems, Tolerancing, Interferometers

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Proceedings Article | 21 August 2020 Presentation

Adaptive x-ray zoom condenser system based on concave and convex mirrors

Yuka Nishioka, Hiroyuki Yamaguchi, Satoshi Matsuyama, Juniki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Lahsen Assoufid, Kazuto Yamauchi

Proceedings Volume 11491, 114910P (2020) https://doi.org/10.1117/12.2568417

KEYWORDS: Mirrors, X-rays, Zoom lenses, X-ray optics, Beam controllers, Beam shaping, Synchrotron radiation, X-ray lasers, Free electron lasers, Control systems

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Proceedings Article | 9 September 2019 Presentation

Beam size measurement for XFEL nanobeam using intensity interferometer of x-ray fluorescence (Conference Presentation)

Nami Nakamura, Satoshi Matsuyama, Takato Inoue, Ichiro Inoue, Taito Osaka, Yuichi Inubushi, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11109, 111090L (2019) https://doi.org/10.1117/12.2532283

KEYWORDS: X-ray fluorescence spectroscopy, Interferometers, Optical testing, Thin films, Nonlinear optics, X-ray optics, Optical fabrication, Optical alignment, Wavefront sensors, Spatial coherence

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Proceedings Article | 9 September 2019 Presentation

Development of x-ray adaptive focusing optical system based on the combination of concave mirror and convex mirror (Conference Presentation)

Hiroyuki Yamaguchi, Satoshi Matsuyama, Junki Sonoyama, Kazuki Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11108, 1110805 (2019) https://doi.org/10.1117/12.2528618

KEYWORDS: X-rays, X-ray optics, Deformable mirrors, Mirrors, Beam controllers, Beam shaping, Synchrotron radiation, X-ray lasers, Free electron lasers, Control systems

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Proceedings Article | 9 September 2019 Presentation

Precision focusing mirror alignment at SACLA using new nanobeam diagnosis (Conference Presentation)

Takato Inoue, Satoshi Matsuyama, Nami Nakamura, Hirokatsu Yumoto, Yuichi Inubushi, Takahisa Koyama, Taito Osaka, Ichiro Inoue, Kensuke Tono, Haruhiko Ohashi, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11108, 1110802 (2019) https://doi.org/10.1117/12.2526972

KEYWORDS: Mirrors, X-rays, Beam shaping, Free electron lasers, Speckle pattern, X-ray lasers, Nanoprobes, Laser development, Diffraction gratings, Interferometers

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Proceedings Article | 9 September 2019 Presentation

Development of high-resolution full-field x-ray microscope based on multilayer advanced Kirkpatrick-Baez mirrors (Conference Presentation)

Satoshi Matsuyama, Jumpei Yamada, Taku Hagiwara, Kazuhiko Omote, Raita Hirose, Yoshihiro Takeda, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11112, 1111207 (2019) https://doi.org/10.1117/12.2528366

KEYWORDS: Mirrors, X-rays, Microscopes, Spatial resolution, X-ray optics, Objectives, Cameras, Stars

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Proceedings Article | 25 September 2017 Open Access

Data handling at SACLA x-ray free electron laser facility and future SPring-8-II synchrotron radiation facility (Conference Presentation)

Tetsuya Ishikawa

Proceedings Volume 10388, 1038802 (2017) https://doi.org/10.1117/12.2271736

KEYWORDS: X-rays, X-ray lasers, Free electron lasers, Synchrotron radiation, CCD image sensors, Image sensors, Sensors, Charge-coupled devices, Detector development, X-ray sources

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Proceedings Article | 6 September 2017 Paper

Development of concave-convex imaging mirror system for a compact and achromatic full-field x-ray microscope

Jumpei Yamada, Satoshi Matsuyama, Shuhei Yasuda, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 10386, 103860C (2017) https://doi.org/10.1117/12.2272904

KEYWORDS: Mirrors, X-rays, X-ray optics, Imaging systems, X-ray imaging, Microscopes, Wavefronts, X-ray microscopy, Chromatic aberrations, Sensors

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Proceedings Article | 27 October 2016 Presentation + Paper

Size-changeable x-ray beam collimation using an adaptive x-ray optical system based on four deformable mirrors

T. Goto, S. Matsuyama, H. Nakamori, H. Hayashi, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 9965, 996502 (2016) https://doi.org/10.1117/12.2238794

KEYWORDS: Mirrors, X-rays, Deformable mirrors, Beam shaping, X-ray optics, Collimation, Optical testing, Actuators, Electrodes, X-ray technology

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Proceedings Article | 17 September 2015 Paper

Development of achromatic full-field hard x-ray microscopy with two monolithic imaging mirrors

S. Matsuyama, H. Kino, S. Yasuda, Y. Kohmura, H. Okada, T. Ishikawa, K. Yamauchi

Proceedings Volume 9592, 959208 (2015) https://doi.org/10.1117/12.2188583

KEYWORDS: Mirrors, X-rays, X-ray imaging, Microscopes, Imaging systems, Hard x-rays, Cameras, Stars, X-ray microscopy, Spatial resolution

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Proceedings Article | 8 October 2014 Paper

Development of split-delay x-ray optics using Si(220) crystals at SACLA

Taito Osaka, Takashi Hirano, Makina Yabashi, Yasuhisa Sano, Kensuke Tono, Yuichi Inubushi, Takahiro Sato, Kanade Ogawa, Satoshi Matsuyama, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 9210, 921009 (2014) https://doi.org/10.1117/12.2060238

KEYWORDS: Crystals, X-rays, Laser crystals, Mirrors, Beam splitters, X-ray optics, Free electron lasers, Alignment procedures, Diffraction, Crystal optics

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Proceedings Article | 3 October 2014 Paper

Development of a one-dimensional two-stage focusing system with two deformable mirrors

T. Goto, S. Matsuyama, H. Nakamori, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 9208, 920802 (2014) https://doi.org/10.1117/12.2061821

KEYWORDS: Mirrors, X-rays, Deformable mirrors, Electrodes, Diffraction, Wavefronts, Actuators, Photography, 3D modeling, X-ray diffraction

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Proceedings Article | 5 September 2014 Paper

Development of achromatic full-field hard x-ray microscopy and its application to x-ray absorption near edge structure spectromicroscopy

S. Matsuyama, Y. Emi, H. Kino, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 9207, 92070Q (2014) https://doi.org/10.1117/12.2060783

KEYWORDS: Mirrors, X-rays, Microscopes, Tungsten, X-ray microscopy, Absorption, Particles, Hard x-rays, Objectives, Spectroscopy

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Proceedings Article | 27 September 2013 Paper

Thin crystal development and applications for hard x-ray free-electron lasers

Taito Osaka, Makina Yabashi, Yasuhisa Sano, Kensuke Tono, Yuichi Inubushi, Takahiro Sato, Kanade Ogawa, Satoshi Matsuyama, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 8848, 884804 (2013) https://doi.org/10.1117/12.2023465

KEYWORDS: Crystals, Laser crystals, Silicon, Beam splitters, X-rays, Helium, Hard x-rays, Atmospheric plasma, Free electron lasers, Diffraction

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Proceedings Article | 27 September 2013 Paper

Damage characteristics of platinum/carbon multilayers under x-ray free-electron laser irradiation

Jangwoo Kim, Takahisa Koyama, Hirokatsu Yumoto, Ayaka Nagahira, Satoshi Matsuyama, Yasuhisa Sano, Makina Yabashi, Haruhiko Ohashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 8848, 88480S (2013) https://doi.org/10.1117/12.2022735

KEYWORDS: Multilayers, X-rays, Reflectivity, Platinum, Grazing incidence, Free electron lasers, Transmission electron microscopy, X-ray optics, Carbon, X-ray lasers

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Proceedings Article | 26 September 2013 Paper

Development of achromatic full-field x-ray microscopy with compact imaging mirror system

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8851, 885107 (2013) https://doi.org/10.1117/12.2023152

KEYWORDS: Mirrors, X-rays, Imaging systems, X-ray optics, X-ray imaging, Microscopes, Point spread functions, Cameras, X-ray microscopy, Spatial resolution

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Proceedings Article | 15 October 2012 Paper

Measurement of groove density variation of varied-line-space grating for high-resolution soft x-ray monochromator

Y. Senba, H. Kishimoto, T. Miura, H. Ohashi, S. Goto, T. Ishikawa

Proceedings Volume 8501, 850104 (2012) https://doi.org/10.1117/12.936518

KEYWORDS: Diffraction, Spectral resolution, Diffraction gratings, Monochromators, X-rays, Tolerancing, Synchrotron radiation, Optical design, Monochromatic aberrations, Statistical analysis

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Proceedings Article | 15 October 2012 Paper

Development of piezoelectric adaptive mirror for hard x-ray nanofocusing

S. Matsuyama, T. Kimura, H. Nakamori, S. Imai, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8503, 850303 (2012) https://doi.org/10.1117/12.930276

KEYWORDS: Mirrors, Deformable mirrors, X-rays, Phase retrieval, Hard x-rays, Actuators, X-ray optics, Electrodes, Wavefronts, Beam shaping

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Proceedings Article | 15 October 2012 Paper

Diamond double-crystal monochromator at SPring-8

S. Goto, H. Yamazaki, Y. Shimizu, M. Suzuki, N. Kawamura, M. Mizumaki, M. Yabashi, K. Tamasaku, T. Ishikawa

Proceedings Volume 8502, 85020A (2012) https://doi.org/10.1117/12.932287

KEYWORDS: Crystals, Monochromators, Diamond, Laser crystals, Near field diffraction, Phase shifts, Image segmentation, Silicon, X-rays, Synchrotron radiation

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Proceedings Article | 28 September 2011 Paper

Upgrade status of hard x-ray 100-nm probe beamlines BL37XU and BL39XU at SPring-8

Takahisa Koyama, Hirokatsu Yumoto, Yasuko Terada, Motohiro Suzuki, Naomi Kawamura, Masaichiro Mizumaki, Nobuteru Nariyama, Tomohiro Matsushita, Yasuhide Ishizawa, Yukito Furukawa, Toru Ohata, Hiroshi Yamazaki, Tomoyuki Takeuchi, Yasunori Senba, Yasuhisa Matsuzaki, Masayuki Tanaka, Yasuhiro Shimizu, Hikaru Kishimoto, Takanori Miura, Hiroaki Kimura, Kunikazu Takeshita, Haruhiko Ohashi, Masaki Yamamoto, Shunji Goto, Masaki Takata, Tetsuya Ishikawa

Proceedings Volume 8139, 81390I (2011) https://doi.org/10.1117/12.893459

KEYWORDS: Mirrors, X-rays, Monochromators, Silicon, Cryogenics, Magnetism, Hard x-rays, Laser beam diagnostics, Light sources, Rhodium

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Proceedings Article | 28 September 2011 Paper

Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy

S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8139, 813905 (2011) https://doi.org/10.1117/12.892987

KEYWORDS: Mirrors, X-rays, X-ray microscopy, Microscopes, Spatial resolution, Point spread functions, X-ray imaging, Imaging systems, X-ray optics, Microscopy

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Proceedings Article | 23 September 2011 Paper

Theory and numerical simulations of x-ray nanofocusing by bent crystal in back diffraction geometry

Alexey Suvorov, Haruhiko Ohashi, Shunji Goto, Tetsuya Ishikawa

Proceedings Volume 8141, 81410S (2011) https://doi.org/10.1117/12.894369

KEYWORDS: Crystals, Diffraction, X-rays, Numerical simulations, X-ray diffraction, Spherical lenses, Reflectivity, Wave propagation, X-ray optics, Monochromatic aberrations

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Proceedings Article | 28 February 2011 Paper

Ablation by short optical and x-ray laser pulses

N. Inogamov, S. Anisimov, V. Zhakhovsky, A. Ya. Faenov, Yu. V. Petrov, V. Khokhlov, V. Fortov, M. Agranat, S. Ashitkov, P. Komarov, I. Yu. Skobelev, Y. Kato, T. Pikuz, V. Shepelev, Y. Fukuda, M. Tanaka, M. Kishimoto, M. Ishino, M. Nishikino, M. Kando, T. Kawachi, M. Nagasono, H. Ohashi, M. Yabashi, K. Tono, Y. Senba, T. Togashi, T. Ishikawa

Proceedings Volume 7996, 79960T (2011) https://doi.org/10.1117/12.887429

KEYWORDS: Laser induced fluorescence, Crystals, Laser ablation, Aluminum, Laser crystals, Picosecond phenomena, Dielectrics, Tellurium, Ionization, Extreme ultraviolet

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Proceedings Article | 24 September 2010 Paper

An adaptive optical system for sub-10nm hard x-ray focusing

H. Mimura, T. Kimura, H. Yokoyama, H. Yumoto, S. Matsuyama, K. Tamasaku, Y. Koumura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 7803, 780304 (2010) https://doi.org/10.1117/12.862291

KEYWORDS: Mirrors, Hard x-rays, X-rays, Wavefronts, X-ray optics, Optical fiber cables, Optical alignment, Phase measurement, Adaptive optics, Control systems

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Proceedings Article | 2 September 2010 Paper

Present status of upgraded long trace profiler for characterization of high-precision x-ray mirrors at SPring-8

Y. Senba, H. Kishimoto, H. Ohashi, H. Yumoto, S. Goto, T. Ishikawa

Proceedings Volume 7801, 780104 (2010) https://doi.org/10.1117/12.861021

KEYWORDS: Mirrors, Beam splitters, Sensors, X-rays, Synchrotron radiation, X-ray characterization, Temperature metrology, Helium neon lasers, Optical components, Ceramics

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Proceedings Article | 27 August 2010 Paper

Analysis of mutual coherence of x-ray beam from rocking curves by perfect crystal

Hiroshi Yamazaki, Tetsuya Ishikawa

Proceedings Volume 7802, 78020P (2010) https://doi.org/10.1117/12.860547

KEYWORDS: X-rays, Crystals, Laser crystals, Silicon, Fourier transforms, Beam analyzers, Spatial resolution, Monochromators, Reflection, Synchrotrons

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Proceedings Article | 27 August 2010 Paper

Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror

S. Matsuyama, T. Wakioka, H. Mimura, T. Kimura, N. Kidani, Y. Sano, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 7802, 780202 (2010) https://doi.org/10.1117/12.860405

KEYWORDS: Mirrors, X-rays, Satellites, Spatial frequencies, Imaging systems, Microscopes, X-ray microscopy, Image resolution, Spatial resolution, Hard x-rays

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Proceedings Article | 3 September 2008 Paper

Fabrication of a 400-mm-long mirror for focusing x-ray free-electron lasers to sub-100 nm

Hidekazu Mimura, Shinya Morita, Takashi Kimura, Daisuke Yamakawa, Weimin Lin, Yoshihiro Uehara, Hirokatsu Yumoto, Satoshi Matsuyama, Yoshinori Nishino, Kenji Tamasaku, Haruhiko Ohashi, Makina Yabashi, Tetsuya Ishikawa, Hitoshi Ohmori, Kazuto Yamauchi

Proceedings Volume 7077, 70770R (2008) https://doi.org/10.1117/12.795643

KEYWORDS: Mirrors, X-rays, Photography, X-ray lasers, Free electron lasers, X-ray technology, Hard x-rays, Particles, Stitching interferometry, Synchrotron technology

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Proceedings Article | 3 September 2008 Paper

Development of adaptive mirror for wavefront correction of hard x-ray nanobeam

Takashi Kimura, Soichiro Handa, Hidekazu Mimura, Hirokatsu Yumoto, Daisuke Yamakawa, Satoshi Matsuyama, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 7077, 707709 (2008) https://doi.org/10.1117/12.796029

KEYWORDS: Mirrors, X-rays, Wavefronts, Ceramics, Hard x-rays, Silicon, Fizeau interferometers, X-ray optics, Optical simulations, Optical components

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Proceedings Article | 3 September 2008 Paper

Investigation of polycrystalline structure of CVD diamond using white-beam x-ray diffraction

Alexey Souvorov, Kentaro Kajiwara, Hiroaki Kimura, Shunji Goto, Tetsuya Ishikawa

Proceedings Volume 7077, 70770N (2008) https://doi.org/10.1117/12.796683

KEYWORDS: Diffraction, Crystals, Diamond, Chemical vapor deposition, X-rays, Sensors, X-ray diffraction, X-ray optics, Scattering, Laser crystals

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Proceedings Article | 8 October 2007 Paper

Directly water-cooled crystal development for SPring-8 bending magnet beamlines

Kunikazu Takeshita, Shunji Goto, Tetsuya Ishikawa

Proceedings Volume 6705, 67050Q (2007) https://doi.org/10.1117/12.735314

KEYWORDS: Crystals, Laser crystals, Monochromators, Finite element methods, Distortion, Photonic crystals, Diffraction, X-rays, Standards development, Silicon

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Proceedings Article | 1 October 2007 Paper

Hard x-ray wavefront measurement and control for hard x-ray nanofocusing

Soichiro Handa, Hidekazu Mimura, Satoshi Matsuyama, Hirokatsu Yumoto, Takashi Kimura, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6704, 670404 (2007) https://doi.org/10.1117/12.733749

KEYWORDS: Mirrors, Wavefronts, Hard x-rays, X-rays, Platinum, Metrology, Sputter deposition, Multilayers, Interferometry, Spherical lenses

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Proceedings Article | 1 October 2007 Paper

Microstitching interferometer and relative angle determinable stitching interferometer for half-meter-long x-ray mirror

Haruhiko Ohashi, Takashi Tsumura, Hiromi Okada, Hidekazu Mimura, Tatsuhiko Masunaga, Yasunori Senba, Shunji Goto, Kazuto Yamauchi, Tetsuya Ishikawa

Proceedings Volume 6704, 670405 (2007) https://doi.org/10.1117/12.733476

KEYWORDS: Mirrors, Multispectral imaging, Interferometers, X-rays, Fizeau interferometers, Actuators, Synchrotron radiation, Head, Photography, Neodymium

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Proceedings Article | 27 September 2007 Paper

Second metrology round-robin of APS, ESRF and SPring-8 laboratories of elliptical and spherical hard-x-ray mirrors

A. Rommeveaux, L. Assoufid, H. Ohashi, H. Mimura, K. Yamauchi, J. Qian, T. Ishikawa, C. Morawe, A. Macrander, A. Khounsary, S. Goto

Proceedings Volume 6704, 67040B (2007) https://doi.org/10.1117/12.736171

KEYWORDS: Mirrors, Spherical lenses, Metrology, X-rays, Error analysis, Silicon, Silicon carbide, Interferometry, Optical components, Sensors

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Proceedings Article | 20 September 2007 Paper

Characterization of beryllium and CVD diamond for synchrotron radiation beamline windows and x-ray beam monitor

S. Goto, S. Takahashi, T. Kudo, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa

Proceedings Volume 6705, 67050H (2007) https://doi.org/10.1117/12.735356

KEYWORDS: Beryllium, X-rays, Diamond, Chemical vapor deposition, Polishing, X-ray imaging, Image transmission, Synchrotron radiation, Diffraction, Surface finishing

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Proceedings Article | 20 September 2007 Paper

Analysis and modification of x-ray mutual coherence with perfect-crystal diffraction

Hiroshi Yamazaki, Tetsuya Ishikawa

Proceedings Volume 6705, 67050J (2007) https://doi.org/10.1117/12.733935

KEYWORDS: Crystals, X-rays, Wave propagation, X-ray diffraction, Reflection, Silicon, Laser crystals, Diffraction, Spatial coherence, Monochromators

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Proceedings Article | 20 September 2007 Paper

Reflective optics for sub-10nm hard x-ray focusing

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, T. Kimura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 6705, 67050L (2007) https://doi.org/10.1117/12.734752

KEYWORDS: Mirrors, X-rays, Multilayers, Hard x-rays, X-ray optics, Reflectivity, Reflection, Diffraction, X-ray diffraction, Optical design

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Proceedings Article | 18 May 2007 Paper

Optics development for Japanese XFEL project

Makina Yabashi, Atsushi Higashiya, Kenji Tamasaku, Hiroaki Kimura, Togo Kudo, Haruhiko Ohashi, Sunao Takahashi, Shunji Goto, Tetsuya Ishikawa

Proceedings Volume 6586, 658605 (2007) https://doi.org/10.1117/12.724318

KEYWORDS: Silicon carbide, Diamond, Silicon, Optical components, Beryllium, Mirrors, X-rays, X-ray optics, Free electron lasers, Monochromators

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Proceedings Article | 29 August 2006 Paper

Evaluation of a modern soft x-ray monochromator with high resolving power over 10,000

Haruhiko Ohashi, Yasunori Senba, Eiji Ishiguro, Shunji Goto, Shik Shin, Tetsuya Ishikawa

Proceedings Volume 6317, 63171A (2006) https://doi.org/10.1117/12.682329

KEYWORDS: Monochromators, Photoemission spectroscopy, Xenon, X-rays, Spectroscopy, Neon, Spectral resolution, Mirrors, Calibration, Doppler effect

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Proceedings Article | 29 August 2006 Paper

Wave-optical simulations for designing and evaluating hard x-ray reflective optics

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, A. Shibatani, K. Katagishi, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Proceedings Volume 6317, 631718 (2006) https://doi.org/10.1117/12.681944

KEYWORDS: Mirrors, X-ray optics, X-rays, Hard x-rays, Reflectivity, Satellites, X-ray sources, Geometrical optics, Optical simulations, Beam shaping

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Proceedings Article | 29 August 2006 Paper

At-wavelength figure metrology of total reflection mirrors in hard x-ray region

Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Soichiro Handa, Akihiko Shibatani, Keiko Katagishi, Yasuhisa Sano, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6317, 631709 (2006) https://doi.org/10.1117/12.681587

KEYWORDS: Mirrors, Metrology, X-rays, Hard x-rays, Optical design, Phase retrieval, Diffraction, Reflection, Multilayers, Photovoltaics

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Proceedings Article | 29 August 2006 Paper

High-spatial-resolution scanning x-ray fluorescence microscope with Kirkpatrick-Baez mirrors

Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhisa Sano, Kazuya Yamamura, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6317, 631719 (2006) https://doi.org/10.1117/12.681964

KEYWORDS: Mirrors, X-rays, X-ray fluorescence spectroscopy, Microscopes, Spatial resolution, Visualization, Gallium, Gold, Hard x-rays, Light sources

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Proceedings Article | 17 September 2005 Paper

Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

Lahsen Assoufid, Amparo Rommeveaux, Haruhiko Ohashi, Kazuto Yamauchi, Hidekazu Mimura, Jun Qian, Olivier Hignette, Tetsuya Ishikawa, Christian Morawe, Albert Macrander, Ali Khounsary, Shunji Goto

Proceedings Volume 5921, 59210J (2005) https://doi.org/10.1117/12.623209

KEYWORDS: Mirrors, Silicon, Metrology, Data conversion, Error analysis, Sensors, X-rays, Fourier transforms, Optical metrology, Synchrotron radiation

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Proceedings Article | 17 September 2005 Paper

Surface figuring and measurement methods with spatial resolution close to 0.1 mm for x-ray mirror fabrication

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Endo, Y. Mori, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Proceedings Volume 5921, 59210M (2005) https://doi.org/10.1117/12.623103

KEYWORDS: Mirrors, Spatial resolution, X-rays, Particles, Multispectral imaging, Head, Hard x-rays, Interferometry, Computing systems, X-ray imaging

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Proceedings Article | 31 August 2005 Paper

Hard x-ray nano-focusing at 40nm level using K-B mirror optics for nanoscopy/spectroscopy

Satoshi Matsuyama, Hidekazu Mimura, Hirokatsu Yumoto, Hideyuki Hara, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5918, 591804 (2005) https://doi.org/10.1117/12.623035

KEYWORDS: Mirrors, X-rays, Tolerancing, Diffraction, Hard x-rays, X-ray optics, Microscopes, Spatial resolution, Autocollimators, X-ray microscopy

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Proceedings Article | 18 October 2004 Paper

Microstitching interferometry for nanofocusing mirror optics

Hidekazu Mimura, Hirokatsu Yumoto, Satoshi Matsuyama, Kazuya Yamamura, Yasuhisa Sano, Kazumasa Ueno, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567511

KEYWORDS: Mirrors, Interferometers, Interferometry, Fizeau interferometers, X-rays, Hard x-rays, Fringe analysis, Superposition, Stitching interferometry, Spatial resolution

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Proceedings Article | 18 October 2004 Paper

Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement

Satoshi Matsuyama, Hidekazu Mimura, Kazuya Yamamura, Hirokatsu Yumoto, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567515

KEYWORDS: Mirrors, X-rays, Hard x-rays, X-ray optics, Optical alignment, X-ray microscopy, Optical simulations, Geometrical optics, Actuators, Mirror pointing

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Proceedings Article | 18 October 2004 Paper

Fabrication technology of ultraprecise mirror optics to realize hard x-ray nanobeam

Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Satoshi Matsuyama, Hirokatsu Yumoto, Kazumasa Ueno, Masafumi Shibahara, Katsuyoshi Endo, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Yuzo Mori

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567501

KEYWORDS: Mirrors, Hard x-rays, X-rays, Electrodes, Head, Plasma, X-ray optics, Manufacturing, Metrology, Platinum

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Proceedings Article | 13 January 2004 Paper

Development of a figure correction method having spatial resolution close to 0.1 mm

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.520825

KEYWORDS: Mirrors, X-rays, X-ray imaging, Spatial resolution, X-ray technology, Optical simulations, Multispectral imaging, Particles, Interferometers, Surface finishing

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Proceedings Article | 13 January 2004 Paper

Fabrication technology of hard x-ray aspherical mirror optics and application to nanospectroscopy

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, Mari Shimura, Yukihito Ishizaka

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.515127

KEYWORDS: Mirrors, X-rays, X-ray fluorescence spectroscopy, Plasma, Electrodes, X-ray optics, Beam shaping, X-ray technology, Chemical reactions, Hard x-rays

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Proceedings Article | 23 December 2003 Paper

Stability issues in the use of coherent x-rays

Yoshinori Nishino, Togo Kudo, Motohiro Suzuki, Tetsuya Ishikawa

Proceedings Volume 5195, (2003) https://doi.org/10.1117/12.512853

KEYWORDS: X-rays, Monochromators, Crystals, Electron beams, X-ray optics, X-ray diffraction, X-ray microscopy, X-ray sources, X-ray fluorescence spectroscopy, Transducers

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