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28 September 2001 Ultraprecision manufacturing of self-assembled microsystems
Andre Sharon, Axel Bilsing, Gordon Lewis
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Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442945
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
This paper introduces a new microfabrication technique that combines ultraprecision micro machining (milling, turning, drilling, and grinding) with sacrificial/structural multi-layer manufacturing processes to produce assembled, three-dimensional microsystems. These systems can comprise true 3-dimensional features that span in size from micrometers through millimeters and can be manufactured from a variety of metallic and polymer materials.
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Andre Sharon, Axel Bilsing, and Gordon Lewis "Ultraprecision manufacturing of self-assembled microsystems", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); https://doi.org/10.1117/12.442945
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KEYWORDS
Manufacturing
Microsystems
Lithium
Microfabrication
Micromachining
Polymers
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